METHOD OF MANUFACTURING CERAMIC SINTERED BODY AND CERAMIC SINTERED BODY: Fid-Bau Portal

METHOD OF MANUFACTURING CERAMIC SINTERED BODY AND CERAMIC SINTERED BODY

TSUGAWA YUTA / ESHIMA YOSHIYUKI / NAKAMURA TAKAHIRO

To improve bondability with a metal plate.SOLUTION: A method of manufacturing a ceramic sintered body includes the steps of: reducing a pressure inside a sintering furnace to a target pressure lower than 3 kPa in a state in which a stacked body stacked of plural ceramic green sheets is housed in the sintering furnace; and firing the stacked body by elevating a temperature inside the sintering furnace while maintaining the pressure-reduced state inside the sintering furnace after the pressure inside the sintering furnace is reduced to the target pressure. In the step of reducing the pressure inside the sintering furnace to the target pressure, at least during a period when the pressure inside the sintering furnace is reduced from 3 kPa to the target pressure, the pressure inside the sintering furnace is reduced so that a maximum value of pressure variation per second inside the sintering furnace is set to be 30 Pa or less.SELECTED DRAWING: Figure 3

【課題】金属板との接合性を向上させる。【解決手段】本開示の一側面に係るセラミック焼結体の製造方法は、複数枚のセラミックグリーンシートが積層された積層体を焼成炉内に収容した状態で、焼成炉内を３ｋＰａよりも小さい目標圧力まで減圧する工程と、焼成炉内を目標圧力まで減圧した後に、焼成炉内を減圧した状態を維持しつつ焼成炉内の温度を上昇させて積層体を焼成する工程とを含む。焼成炉内を目標圧力まで減圧する工程では、少なくとも焼成炉内の圧力が３ｋＰａから目標圧力まで低下する期間において、焼成炉内における圧力の１秒間あたりの変化量の最大値が３０Ｐａ以下となるように焼成炉内を減圧する。【選択図】図３

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