Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
To provide an electrostatic chuck member and an electrostatic chuck device that have high heat uniformity even when increasing a current flowing through an electrode layer or increasing the frequency of a supplied voltage.SOLUTION: An electrostatic chuck member includes a plate-shaped base including an electrode layer provided with a mounting surface on which a sample is mounted and a lower surface located on the opposite side of the mounting surface, and located between the mounting surface and the lower surface and extending along the mounting surface, and a columnar power feeding unit extending from the electrode layer to the lower surface side, and a terminal member connected to an end surface of the power feeding unit, where the outer diameter of the power feeding unit is 2 mm or more, the power feeding unit and the terminal member are brazed together at a brazed unit, and the brazed unit is located on the lower side of a position 1/2 between the bottom surface of the base and the electrode layer.SELECTED DRAWING: Figure 2
【課題】電極層に流す電流を大きくする場合や、供給電圧の周波数を高くする場合においても均熱性が高い静電チャック部材、および静電チャック装置を提供する。【解決手段】試料を搭載する載置面と載置面の反対側に位置する下面とが設けられ、載置面と下面との間に位置し、載置面に沿って延びる電極層と、電極層から下面側に延びる柱状の給電部と、を備える板状の基体と、給電部の端面に接続される端子部材と、を備え、給電部の外径は、２ｍｍ以上であり、給電部と端子部材とは、ロウ付け部においてロウ付け接続され、ロウ付け部は、基体の下面と電極層との間の１／２の位置より下面側に位置する、静電チャック部材。【選択図】図２
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
To provide an electrostatic chuck member and an electrostatic chuck device that have high heat uniformity even when increasing a current flowing through an electrode layer or increasing the frequency of a supplied voltage.SOLUTION: An electrostatic chuck member includes a plate-shaped base including an electrode layer provided with a mounting surface on which a sample is mounted and a lower surface located on the opposite side of the mounting surface, and located between the mounting surface and the lower surface and extending along the mounting surface, and a columnar power feeding unit extending from the electrode layer to the lower surface side, and a terminal member connected to an end surface of the power feeding unit, where the outer diameter of the power feeding unit is 2 mm or more, the power feeding unit and the terminal member are brazed together at a brazed unit, and the brazed unit is located on the lower side of a position 1/2 between the bottom surface of the base and the electrode layer.SELECTED DRAWING: Figure 2
【課題】電極層に流す電流を大きくする場合や、供給電圧の周波数を高くする場合においても均熱性が高い静電チャック部材、および静電チャック装置を提供する。【解決手段】試料を搭載する載置面と載置面の反対側に位置する下面とが設けられ、載置面と下面との間に位置し、載置面に沿って延びる電極層と、電極層から下面側に延びる柱状の給電部と、を備える板状の基体と、給電部の端面に接続される端子部材と、を備え、給電部の外径は、２ｍｍ以上であり、給電部と端子部材とは、ロウ付け部においてロウ付け接続され、ロウ付け部は、基体の下面と電極層との間の１／２の位置より下面側に位置する、静電チャック部材。【選択図】図２
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
静電チャック部材、および静電チャック装置
OISHI KENTA (Autor:in) / MIURA YUKIO (Autor:in) / MAEDA SHINICHI (Autor:in) / MORISHITA NARUTO (Autor:in)
29.09.2023
Patent
Elektronische Ressource
Japanisch
| Europäisches Patentamt | 2023
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