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Method for making a high temperature resistant silicon alloy joint for the joining of ceramics and devices using same
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride or other ceramics, and the pieces may be brazed with a silicon and an alloying element under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the interior of a heater or electrostatic chuck.
Method for making a high temperature resistant silicon alloy joint for the joining of ceramics and devices using same
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride or other ceramics, and the pieces may be brazed with a silicon and an alloying element under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the interior of a heater or electrostatic chuck.
Method for making a high temperature resistant silicon alloy joint for the joining of ceramics and devices using same
ELLIOT BRENT (Autor:in) / ELLIOTT ALFRED GRANT (Autor:in)
20.08.2019
Patent
Elektronische Ressource
Englisch
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