Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Method for manufacture of a multi-layer plate device
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
Method for manufacture of a multi-layer plate device
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
Method for manufacture of a multi-layer plate device
ELLIOT ALFRED GRANT (Autor:in) / ELLIOT BRENT DONALD ALFRED (Autor:in) / BALMA FRANK (Autor:in) / SCHUSTER RICHARD ERICH (Autor:in) / REX DENNIS GEORGE (Autor:in) / VEYTSER ALEXANDER (Autor:in)
12.05.2020
Patent
Elektronische Ressource
Englisch
IPC:
B23K
Löten
,
SOLDERING OR UNSOLDERING
/
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
C04B
Kalk
,
LIME
/
F16B
DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES
,
Vorrichtungen zum Befestigen oder Sichern von Konstruktionselementen oder Maschinenteilen, z.B. Nägel, Bolzen, Schrauben, Sprengringe, Klemmen, Klammern oder Keile
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
H05B
ELECTRIC HEATING
,
Elektrische Heizung
MULTI-LAYER PLASTIC CARRIER PLATE AND THE METHOD OF ITS MANUFACTURE
| Europäisches Patentamt | 2021
DECORATIVE PANEL WITH A MULTI-LAYER PLASTIC CARRIER PLATE AND THE METHOD OF ITS MANUFACTURE
| Europäisches Patentamt | 2021