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Aluminum nitride sintered compact and method for producing same
An aluminum nitride sintered compact containing aluminum nitride crystal grains and composite oxide crystal grains containing a rare earth element and an aluminum element, wherein a median diameter of the aluminum nitride crystal grains is 2 μm or less; 10 to 200 intergrain voids having a longest diameter of 0.2 to 1 μm are dispersed in a region of a cross section of 100 μm in square; and the carbon atom content is less than 0.10% by mass. Also disclosed is a method of producing the aluminum nitride sintered compact.
Aluminum nitride sintered compact and method for producing same
An aluminum nitride sintered compact containing aluminum nitride crystal grains and composite oxide crystal grains containing a rare earth element and an aluminum element, wherein a median diameter of the aluminum nitride crystal grains is 2 μm or less; 10 to 200 intergrain voids having a longest diameter of 0.2 to 1 μm are dispersed in a region of a cross section of 100 μm in square; and the carbon atom content is less than 0.10% by mass. Also disclosed is a method of producing the aluminum nitride sintered compact.
Aluminum nitride sintered compact and method for producing same
MIYAMOTO DAISUKE (Autor:in) / SHIOI KOSUKE (Autor:in)
29.09.2020
Patent
Elektronische Ressource
Englisch
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