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    Ceramic structure, electrostatic chuck and substrate fixing device

    Neue Suche nach: MINEMURA TOMOTAKE

    A ceramic structure includes a base body, and a thermoelectric device having a part in directly contact with the base body. The base body is a ceramic consisting of aluminum oxide. The thermoelectric device comprises a conductor part that is a sintered body having an alloy of tungsten and rhenium, as a main component, and including nickel oxide, aluminum oxide and silicon dioxide.

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    Ceramic structure, electrostatic chuck and substrate fixing device

    Neue Suche nach: MINEMURA TOMOTAKE

    A ceramic structure includes a base body, and a thermoelectric device having a part in directly contact with the base body. The base body is a ceramic consisting of aluminum oxide. The thermoelectric device comprises a conductor part that is a sintered body having an alloy of tungsten and rhenium, as a main component, and including nickel oxide, aluminum oxide and silicon dioxide.

    Zugriff

    Download

    Ceramic structure, electrostatic chuck and substrate fixing device

    Neue Suche nach: MINEMURA TOMOTAKE

    A ceramic structure includes a base body, and a thermoelectric device having a part in directly contact with the base body. The base body is a ceramic consisting of aluminum oxide. The thermoelectric device comprises a conductor part that is a sintered body having an alloy of tungsten and rhenium, as a main component, and including nickel oxide, aluminum oxide and silicon dioxide.

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    Zugriff

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    Dokumentinformationen
    Ähnliche Titel

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    Dokumentinformationen
    Titel:

    Ceramic structure, electrostatic chuck and substrate fixing device

    Beteiligte:

    MINEMURA TOMOTAKE (Autor:in)

    Erscheinungsdatum:

    23.05.2023

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Englisch

    Klassifikation:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / H10N

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