Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CORROSION-RESISTANT COMPONENTS AND METHODS OF MAKING
A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a corrosion-resistant non-porous layer associated with the ceramic insulating substrate, the corrosion-resistant non-porous layer having a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, the corrosion-resistant non-porous layer characterized by a microstructure substantially devoid of microcracks and fissures, and having an average grain size of at least about 100 nm and at most about 100 μm. Assemblies including corrosion-resistant components and methods of making are also disclosed.
CORROSION-RESISTANT COMPONENTS AND METHODS OF MAKING
A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a corrosion-resistant non-porous layer associated with the ceramic insulating substrate, the corrosion-resistant non-porous layer having a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, the corrosion-resistant non-porous layer characterized by a microstructure substantially devoid of microcracks and fissures, and having an average grain size of at least about 100 nm and at most about 100 μm. Assemblies including corrosion-resistant components and methods of making are also disclosed.
CORROSION-RESISTANT COMPONENTS AND METHODS OF MAKING
SIMPSON MATTHEW (Autor:in) / DIVAKAR RAMESH (Autor:in) / FILER ALAN (Autor:in)
18.05.2017
Patent
Elektronische Ressource
Englisch