Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SAFETY FENCE, TRANSFER DEVICE INCLUDING A SAFETY FENCE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING A SAFETY FENCE
A transfer device may include a transfer part including transfer rails installed on a ceiling of a manufacturing line for an integrated circuit device and a transfer vehicle running along the transfer rails, and a safety fence disposed adjacent to the transfer part. The safety fence may include a plurality of first horizontal supporting portions disposed in parallel to the transfer rails, a plurality of second horizontal supporting portions connecting the plurality of first horizontal supporting portions to the transfer rails, a plurality of vertical supporting portions extended from the plurality of horizontal supporting portions, respectively, and a plate portion connected to the plurality of vertical supporting portions. The safety fence may be partially foldable and partially unfoldable.
SAFETY FENCE, TRANSFER DEVICE INCLUDING A SAFETY FENCE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING A SAFETY FENCE
A transfer device may include a transfer part including transfer rails installed on a ceiling of a manufacturing line for an integrated circuit device and a transfer vehicle running along the transfer rails, and a safety fence disposed adjacent to the transfer part. The safety fence may include a plurality of first horizontal supporting portions disposed in parallel to the transfer rails, a plurality of second horizontal supporting portions connecting the plurality of first horizontal supporting portions to the transfer rails, a plurality of vertical supporting portions extended from the plurality of horizontal supporting portions, respectively, and a plate portion connected to the plurality of vertical supporting portions. The safety fence may be partially foldable and partially unfoldable.
SAFETY FENCE, TRANSFER DEVICE INCLUDING A SAFETY FENCE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING A SAFETY FENCE
SEO EUNHO (Autor:in) / JUN SANGPYO (Autor:in) / BAEK SUNGHYUP (Autor:in) / KIM HYOCHUL (Autor:in) / LEE INKWANG (Autor:in)
29.06.2023
Patent
Elektronische Ressource
Englisch