Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
MULTI-LAYER CERAMIC PLATE DEVICE
An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.
MULTI-LAYER CERAMIC PLATE DEVICE
An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.
MULTI-LAYER CERAMIC PLATE DEVICE
PARKER MICHAEL (Autor:in) / ELLIOT ALFRED GRANT (Autor:in) / ELLIOT BRENT DONALD ALFRED (Autor:in) / BALMA FRANK (Autor:in) / SCHUSTER RICHARD ERICH (Autor:in) / REX DENNIS GEORGE (Autor:in) / VEYTSER ALEXANDER (Autor:in)
02.11.2023
Patent
Elektronische Ressource
Englisch
IPC:
B23K
Löten
,
SOLDERING OR UNSOLDERING
/
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
C04B
Kalk
,
LIME
/
F16B
DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES
,
Vorrichtungen zum Befestigen oder Sichern von Konstruktionselementen oder Maschinenteilen, z.B. Nägel, Bolzen, Schrauben, Sprengringe, Klemmen, Klammern oder Keile
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
H05B
ELECTRIC HEATING
,
Elektrische Heizung
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