Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Support construction, fixing element and method
The invention relates to a support construction (1) for fabrication equipment of microscopic structures, comprising a monolithic foundation body (3) on which, for fixing the fabrication equipment, a fixing element (6) is provided comprising a resilient element. The fixing element further comprises a rigid element (10) whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value. The support construction is further designed such that, regardless of the size of the dynamic force applied to the fixing element, a static force applied to the fixing element is substantially transmitted via the resilient element to the foundation body.
Support construction, fixing element and method
The invention relates to a support construction (1) for fabrication equipment of microscopic structures, comprising a monolithic foundation body (3) on which, for fixing the fabrication equipment, a fixing element (6) is provided comprising a resilient element. The fixing element further comprises a rigid element (10) whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value. The support construction is further designed such that, regardless of the size of the dynamic force applied to the fixing element, a static force applied to the fixing element is substantially transmitted via the resilient element to the foundation body.
Support construction, fixing element and method
DE ROEST ANTON HERRIUS (Autor:in) / FRERIKSEN MARCO JAN ANTONI (Autor:in)
23.06.2015
Patent
Elektronische Ressource
Englisch
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