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Composition for forming aluminum-containing film, and method for forming aluminum-containing film
A composition for forming an aluminum-containing film includes an organic solvent, and an organic aluminum compound. The organic aluminum compound has a structure represented by a general formula (1). In the general formula (1), each of R1 to R6 is independently a hydrogen atom or a hydrocarbon group, each of R1s, R2s, R3s, R4s, R5s and R6s is identical or different, and optionally each of R1s, R2s, R3s, R4s, R5s or R6s is linked to one another.
Composition for forming aluminum-containing film, and method for forming aluminum-containing film
A composition for forming an aluminum-containing film includes an organic solvent, and an organic aluminum compound. The organic aluminum compound has a structure represented by a general formula (1). In the general formula (1), each of R1 to R6 is independently a hydrogen atom or a hydrocarbon group, each of R1s, R2s, R3s, R4s, R5s and R6s is identical or different, and optionally each of R1s, R2s, R3s, R4s, R5s or R6s is linked to one another.
Composition for forming aluminum-containing film, and method for forming aluminum-containing film
NAKAGAWA HISASHI (Autor:in) / SAKAI TATSUYA (Autor:in)
14.07.2015
Patent
Elektronische Ressource
Englisch
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