Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Piezoelectric actuator, ink jet head, and method for producing piezoelectric actuator
A head has a base and a piezoelectric element which is superimposed on and fastened to the base in a thickness direction. The piezoelectric element has a plate-shaped piezoelectric body, and a common electrode and a individual electrode arranged so as to sandwich the piezoelectric body in the thickness direction. The base has a higher thermal expansion coefficient than the piezoelectric body (the piezoelectric element 23). The piezoelectric body has a tetragonal principal crystal phase, in which the degree of orientation of the c-axis toward one side in the thickness direction (positive side in z direction) in the region sandwiched by the common electrode and the individual electrode is 44% or more and 56% or less in terms of the Lotgering factor and in which the residual stress in the surface direction is 0 MPa or more and 35 MPa or less in the direction of compression.
Piezoelectric actuator, ink jet head, and method for producing piezoelectric actuator
A head has a base and a piezoelectric element which is superimposed on and fastened to the base in a thickness direction. The piezoelectric element has a plate-shaped piezoelectric body, and a common electrode and a individual electrode arranged so as to sandwich the piezoelectric body in the thickness direction. The base has a higher thermal expansion coefficient than the piezoelectric body (the piezoelectric element 23). The piezoelectric body has a tetragonal principal crystal phase, in which the degree of orientation of the c-axis toward one side in the thickness direction (positive side in z direction) in the region sandwiched by the common electrode and the individual electrode is 44% or more and 56% or less in terms of the Lotgering factor and in which the residual stress in the surface direction is 0 MPa or more and 35 MPa or less in the direction of compression.
Piezoelectric actuator, ink jet head, and method for producing piezoelectric actuator
IWASHITA SHUZO (Autor:in)
10.11.2015
Patent
Elektronische Ressource
Englisch
PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
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