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Dielectric-thin-film forming composition, method of forming dielectric thin film, and dielectric thin film formed by the method
A dielectric-thin-film forming composition for forming a BST dielectric thin film, includes a liquid composition for forming a thin film which takes a form of a mixed composite metal oxide in which a composite oxide B including Cu (copper) is mixed into a composite metal oxide A expressed by a formula: Ba1-xSrxTiyO3 (wherein 0.2<0.15.
Dielectric-thin-film forming composition, method of forming dielectric thin film, and dielectric thin film formed by the method
A dielectric-thin-film forming composition for forming a BST dielectric thin film, includes a liquid composition for forming a thin film which takes a form of a mixed composite metal oxide in which a composite oxide B including Cu (copper) is mixed into a composite metal oxide A expressed by a formula: Ba1-xSrxTiyO3 (wherein 0.2<0.15.
Dielectric-thin-film forming composition, method of forming dielectric thin film, and dielectric thin film formed by the method
GUEGAN GUILLAUME (Autor:in) / WATANABE TOSHIAKI (Autor:in) / SOYAMA NOBUYUKI (Autor:in) / SAKURAI HIDEAKI (Autor:in)
14.03.2017
Patent
Elektronische Ressource
Englisch
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