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Hafnium or zirconium oxide coating
The invention concerns an optical coating (3, 3′), having a high refractive index and good optical properties (i.e., low absorption and scatter) and limited internal stresses in a spectral range extending from the visible to the near UV range (i.e., up to a wavelength of 220 nm). The coating (3, 3′) according to the invention consists of a hafnium- or zirconium-containing oxide HfxSiyOz or ZrxSiyOz containing an silicon fraction (y) between 1 at. % and 10 at. %, especially between 1.5 at. % and 3 at. %.
Hafnium or zirconium oxide coating
The invention concerns an optical coating (3, 3′), having a high refractive index and good optical properties (i.e., low absorption and scatter) and limited internal stresses in a spectral range extending from the visible to the near UV range (i.e., up to a wavelength of 220 nm). The coating (3, 3′) according to the invention consists of a hafnium- or zirconium-containing oxide HfxSiyOz or ZrxSiyOz containing an silicon fraction (y) between 1 at. % and 10 at. %, especially between 1.5 at. % and 3 at. %.
Hafnium or zirconium oxide coating
SCHERER MICHAEL (Autor:in)
29.05.2018
Patent
Elektronische Ressource
Englisch
IPC:
C09D
Überzugsmittel, z.B. Anstrichstoffe, Firnisse oder Lacke
,
COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
G02B
Optische Elemente, Systeme oder Geräte
,
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
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