Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SMA Linear Actuators
Abstract The unique properties of SMA microactuators appear to be very attractive for microrobotic applications. In the following, SMA linear actuators and related optical microswitches and microgrippers will be discussed. As for SMA microvalves, a dedicated technological approach is pursued for their realization, which is based on micromachining SMA plates or foils with optimized lateral shape and subsequent hybrid integration. This approach proves particularly advantageous in the combination of several microactuators to monolithic actuation systems, which can be fabricated from a single piece of SMA material in one process step. Recent publications on the development activities described in this chapter can be found in Refs. [182, 193, 272–278].
SMA Linear Actuators
Abstract The unique properties of SMA microactuators appear to be very attractive for microrobotic applications. In the following, SMA linear actuators and related optical microswitches and microgrippers will be discussed. As for SMA microvalves, a dedicated technological approach is pursued for their realization, which is based on micromachining SMA plates or foils with optimized lateral shape and subsequent hybrid integration. This approach proves particularly advantageous in the combination of several microactuators to monolithic actuation systems, which can be fabricated from a single piece of SMA material in one process step. Recent publications on the development activities described in this chapter can be found in Refs. [182, 193, 272–278].
SMA Linear Actuators
PD Dr. rer. nat. habil. Kohl, Manfred (Autor:in)
01.01.2004
58 pages
Aufsatz/Kapitel (Buch)
Elektronische Ressource
Englisch
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