Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Microelectromechanical systems, or MEMS, is the generic name for a new class of microsystems. Typically, MEMS are: micron- to millimeter-scale devices with moving parts or containing fluids; parts that are batch fabricated using techniques derived from the semiconductor industry; used as sensors or actuators; and are often directly connected or integrated with ICs. The first MEMS design system, MEMCAD, was built in the Senturia Lab at MIT. Now at least three companies market commercial CAD systems for MEMS. The author discusses MEMCAD system's capabilities.
Microelectromechanical systems, or MEMS, is the generic name for a new class of microsystems. Typically, MEMS are: micron- to millimeter-scale devices with moving parts or containing fluids; parts that are batch fabricated using techniques derived from the semiconductor industry; used as sensors or actuators; and are often directly connected or integrated with ICs. The first MEMS design system, MEMCAD, was built in the Senturia Lab at MIT. Now at least three companies market commercial CAD systems for MEMS. The author discusses MEMCAD system's capabilities.
Integrating CAD tools for MEMS design
Gilbert, J.R. (Autor:in)
Computer, Long Beach ; 31 ; 99-101
1998
3 Seiten
Aufsatz (Zeitschrift)
Englisch
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