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Laser chemical etching of copper films [2403-34]

Aliouchouche, A. / Boulmer, J. / Debarre, D. / Bourguignon, B. / SPIE

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Laser chemical etching of copper films [2403-34]

Aliouchouche, A. / Boulmer, J. / Debarre, D. / Bourguignon, B. / SPIE

Laser chemical etching of copper films [2403-34]

Aliouchouche, A. / Boulmer, J. / Debarre, D. / Bourguignon, B. / SPIE

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Check availability in my library

Order at Subito €

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Document information

Title:

Laser chemical etching of copper films [2403-34]

Contributors:

Aliouchouche, A. (author) / Boulmer, J. (author) / Debarre, D. (author) / Bourguignon, B. (author) / Dobowski, J. J. / SPIE

Conference:

Conference, Laser-induced thin film processing ; 1995 ; San Jose; CA

Published in:

Laser-induced thin film processing ; 425-435

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

Publication date:

1995-01-01

Size:

11 pages

ISBN:

0819417505

ISSN:

0361-0748

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

laser induced thin film processing , SPIE

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