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    Atom-resolved study of laser-induced etching processes at chlorine-adsorbed Si(111) surfaces (Invited Paper) [2547-22]

    New search for: Komori, F.
    New search for: Hattori, K.
    New search for: Hicks, J. M.
    New search for: Ho, W.
    New search for: Dai, H.-L.
    New search for: SPIE

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    Atom-resolved study of laser-induced etching processes at chlorine-adsorbed Si(111) surfaces (Invited Paper) [2547-22]

    New search for: Komori, F.
    New search for: Hattori, K.
    New search for: Hicks, J. M.
    New search for: Ho, W.
    New search for: Dai, H.-L.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Atom-resolved study of laser-induced etching processes at chlorine-adsorbed Si(111) surfaces (Invited Paper) [2547-22]

    New search for: Komori, F.
    New search for: Hattori, K.
    New search for: Hicks, J. M.
    New search for: Ho, W.
    New search for: Dai, H.-L.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Atom-resolved study of laser-induced etching processes at chlorine-adsorbed Si(111) surfaces (Invited Paper) [2547-22]

    Contributors:

    Komori, F. (author) / Hattori, K. (author) / Hicks, J. M. / Ho, W. / Dai, H.-L. / SPIE

    Conference:

    Conference, Laser techniques for surface science II ; 1995 ; San Diego; CA

    Published in:

    Laser techniques for surface science II ; 285-297

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

    Publication date:

    1995-01-01

    Size:

    13 pages

    ISBN:

    0819419060

    ISSN:

    0361-0748

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    SPIE , laser techniques , surface science

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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