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Estimation of intrinsic stresses and elastic moduli in thin films [4097-28]
Estimation of intrinsic stresses and elastic moduli in thin films [4097-28]
Estimation of intrinsic stresses and elastic moduli in thin films [4097-28]
Andia, P. C. (author) / Costanzo, F. (author) / Gray, G. L. (author) / Lakhtakia, A. / Weiglhofer, W. S. / Messier, R. F. / International Society for Optical Engineering
Conference, Complex mediums ; 2000 ; San Diego, CA
2000-01-01
11 pages
Conference paper
English
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