Combinatorial methodology for optimizing oxide/semiconductor interface with atomic interfacial layers [4281-02]: Fid-Bau Portal

Combinatorial methodology for optimizing oxide/semiconductor interface with atomic interfacial layers [4281-02]

Chikyow, T. / Ahmet, P. / Nakajima, K. / Koida, T. / Takakura, M. / Yoshimoto, M. / Koinuma, H. / International Society for Optical Engineering

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Combinatorial methodology for optimizing oxide/semiconductor interface with atomic interfacial layers [4281-02]

Chikyow, T. / Ahmet, P. / Nakajima, K. / Koida, T. / Takakura, M. / Yoshimoto, M. / Koinuma, H. / International Society for Optical Engineering

Combinatorial methodology for optimizing oxide/semiconductor interface with atomic interfacial layers [4281-02]

Chikyow, T. / Ahmet, P. / Nakajima, K. / Koida, T. / Takakura, M. / Yoshimoto, M. / Koinuma, H. / International Society for Optical Engineering

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Title:

Combinatorial methodology for optimizing oxide/semiconductor interface with atomic interfacial layers [4281-02]

Contributors:

Chikyow, T. (author) / Ahmet, P. (author) / Nakajima, K. (author) / Koida, T. (author) / Takakura, M. (author) / Yoshimoto, M. (author) / Koinuma, H. (author) / Jabbour, G. E. / Koinuma, H. / International Society for Optical Engineering

Conference:

Conference; 2nd, Combinatorial and composition spread techniques in materials and device development ; 2001 ; San Jose, CA

Published in:

Combinatorial and composition spread techniques in materials and device development ; 1-16

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4281

Publication date:

2001-01-01

Size:

16 pages

ISBN:

0819439592

ISSN:

0277-786X

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

combinatorial spread techniques , composition spread techniques , device development , spread techniques

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