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Effect of Argon Addition During ECR Mode Nucleation of Diamond Films Grown by MPCVD
Effect of Argon Addition During ECR Mode Nucleation of Diamond Films Grown by MPCVD
Effect of Argon Addition During ECR Mode Nucleation of Diamond Films Grown by MPCVD
Jayaseelan, V. S. (author) / Shanov, V. (author) / Singh, R. N. (author) / Tuttle, Bruce / American Ceramic Society
Advanced dielectric, piezoelectric and ferroelectric thin films symposium ; 2004 ; Indianapolis, Ind.
2005-01-01
10 pages
Held as part of the 106th Annual Meeting of the American Ceramic Society.
Conference paper
English
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