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Elementary processes of surface reaction in amorphous silicon film growth
Elementary processes of surface reaction in amorphous silicon film growth
Elementary processes of surface reaction in amorphous silicon film growth
Oikawa, S. (author) / Ohtsuka, S. (author) / Tsuda, M. (author)
APPLIED SURFACE SCIENCE ; 60 ; 29
1992-01-01
29 pages
Article (Journal)
Unknown
DDC:
621.35
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