Laser-induced deposition of aluminium on gallium arsenide and silicon nitride from trimethylamine alane: Fid-Bau Portal

Laser-induced deposition of aluminium on gallium arsenide and silicon nitride from trimethylamine alane

Frugier, T. / Boulahia, A. / Sayah, A. / Tonneau, D.

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Laser-induced deposition of aluminium on gallium arsenide and silicon nitride from trimethylamine alane

Frugier, T. / Boulahia, A. / Sayah, A. / Tonneau, D.

Laser-induced deposition of aluminium on gallium arsenide and silicon nitride from trimethylamine alane

Frugier, T. / Boulahia, A. / Sayah, A. / Tonneau, D.

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Document information

Title:

Laser-induced deposition of aluminium on gallium arsenide and silicon nitride from trimethylamine alane

Contributors:

Frugier, T. (author) / Boulahia, A. (author) / Sayah, A. (author) / Tonneau, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 69 ; 305

Publication date:

1993-01-01

Size:

305 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

Tonneau, D. / Bouree, J. E. / Pauleau, Y. | British Library Online Contents | 1995

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