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    Sputter profiling of AlGaAs/GaAs superlattice structures using oxygen and argon ions

    New search for: Linnarsson, M. K.
    New search for: Svensson, B. G.
    New search for: Andersson, T. G.
    New search for: Wang, S. M.

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    Sputter profiling of AlGaAs/GaAs superlattice structures using oxygen and argon ions

    New search for: Linnarsson, M. K.
    New search for: Svensson, B. G.
    New search for: Andersson, T. G.
    New search for: Wang, S. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Sputter profiling of AlGaAs/GaAs superlattice structures using oxygen and argon ions

    New search for: Linnarsson, M. K.
    New search for: Svensson, B. G.
    New search for: Andersson, T. G.
    New search for: Wang, S. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Sputter profiling of AlGaAs/GaAs superlattice structures using oxygen and argon ions

    Contributors:

    Linnarsson, M. K. (author) / Svensson, B. G. (author) / Andersson, T. G. (author) / Wang, S. M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 70/71 ; 40

    Publication date:

    1993-01-01

    Size:

    40 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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