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Microstructural properties of DC magnetron sputtered a-Si:H and a-Si~1~-~xC~x:H
Microstructural properties of DC magnetron sputtered a-Si:H and a-Si~1~-~xC~x:H
Microstructural properties of DC magnetron sputtered a-Si:H and a-Si~1~-~xC~x:H
Gracin, D. (author) / Ivanda, M. (author) / Lugomer, S. (author) / Desnica, U. V. (author)
APPLIED SURFACE SCIENCE ; 70/71 ; 686
1993-01-01
686 pages
Article (Journal)
Unknown
DDC:
621.35
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Microstructural properties of DC magnetron sputtered a-Si:H and a-Si~1~-~xC~x:H
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