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Growth of silicon microcrystals in thin surface layers of quartz glass with vacuum ultraviolet laser processing

Kurosawa, K. / Sasaki, W. / Takigawa, Y. / Ohmukai, M.

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Growth of silicon microcrystals in thin surface layers of quartz glass with vacuum ultraviolet laser processing

Kurosawa, K. / Sasaki, W. / Takigawa, Y. / Ohmukai, M.

Growth of silicon microcrystals in thin surface layers of quartz glass with vacuum ultraviolet laser processing

Kurosawa, K. / Sasaki, W. / Takigawa, Y. / Ohmukai, M.

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Document information

Title:

Growth of silicon microcrystals in thin surface layers of quartz glass with vacuum ultraviolet laser processing

Contributors:

Kurosawa, K. (author) / Sasaki, W. (author) / Takigawa, Y. (author) / Ohmukai, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 70/71 ; 712

Publication date:

1993-01-01

Size:

712 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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