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    Evaluation of properties of aluminum films deposited using an ultrahigh vacuum sputtering system

    New search for: Toyoda, S.
    New search for: Kiyota, T.
    New search for: Tamagawa, K.
    New search for: Yamakawa, H.

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    Evaluation of properties of aluminum films deposited using an ultrahigh vacuum sputtering system

    New search for: Toyoda, S.
    New search for: Kiyota, T.
    New search for: Tamagawa, K.
    New search for: Yamakawa, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Evaluation of properties of aluminum films deposited using an ultrahigh vacuum sputtering system

    New search for: Toyoda, S.
    New search for: Kiyota, T.
    New search for: Tamagawa, K.
    New search for: Yamakawa, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Evaluation of properties of aluminum films deposited using an ultrahigh vacuum sputtering system

    Contributors:

    Toyoda, S. (author) / Kiyota, T. (author) / Tamagawa, K. (author) / Yamakawa, H. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 163 ; 167

    Publication date:

    1993-01-01

    Size:

    167 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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