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    Morphology of TiN films deposited by arc-like plasma-enhanced ion plating

    New search for: Kajioka, H.
    New search for: Higuchi, K.
    New search for: Kawashimo, Y.

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    Morphology of TiN films deposited by arc-like plasma-enhanced ion plating

    New search for: Kajioka, H.
    New search for: Higuchi, K.
    New search for: Kawashimo, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Morphology of TiN films deposited by arc-like plasma-enhanced ion plating

    New search for: Kajioka, H.
    New search for: Higuchi, K.
    New search for: Kawashimo, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Morphology of TiN films deposited by arc-like plasma-enhanced ion plating

    Contributors:

    Kajioka, H. (author) / Higuchi, K. (author) / Kawashimo, Y. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 163 ; 201

    Publication date:

    1993-01-01

    Size:

    201 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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