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Local Analysis of Internal Interfaces in Integrated Microcircuits by Auger Electron Spectroscopy

Troneva, M. A. / Penskii, N. V.

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Local Analysis of Internal Interfaces in Integrated Microcircuits by Auger Electron Spectroscopy

Troneva, M. A. / Penskii, N. V.

Local Analysis of Internal Interfaces in Integrated Microcircuits by Auger Electron Spectroscopy

Troneva, M. A. / Penskii, N. V.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Local Analysis of Internal Interfaces in Integrated Microcircuits by Auger Electron Spectroscopy

Contributors:

Troneva, M. A. (author) / Penskii, N. V. (author)

Published in:

INDUSTRIAL LABORATORY C/C OF ZAVODSKAIA LABORATORIIA ; 58 ; 727

Publication date:

1992-01-01

Size:

727 pages

ISSN:

0019-8447

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 607.2

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