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Thin film switching devices using amorphous silicon/silicon carbon multilayers

Hatanaka, Y. / Suzuki, M. / Watanabe, K. / Nakanishi, Y.

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Thin film switching devices using amorphous silicon/silicon carbon multilayers

Hatanaka, Y. / Suzuki, M. / Watanabe, K. / Nakanishi, Y.

Thin film switching devices using amorphous silicon/silicon carbon multilayers

Hatanaka, Y. / Suzuki, M. / Watanabe, K. / Nakanishi, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Thin film switching devices using amorphous silicon/silicon carbon multilayers

Contributors:

Hatanaka, Y. (author) / Suzuki, M. (author) / Watanabe, K. (author) / Nakanishi, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 65//66 ; 532

Publication date:

1993-01-01

Size:

532 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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