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Microtribological improvement of carbon film by silicon inclusion and fluorination

Miyake, S. / Miyamoto, T. / Kaneko, R.

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Microtribological improvement of carbon film by silicon inclusion and fluorination

Miyake, S. / Miyamoto, T. / Kaneko, R.

Microtribological improvement of carbon film by silicon inclusion and fluorination

Miyake, S. / Miyamoto, T. / Kaneko, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microtribological improvement of carbon film by silicon inclusion and fluorination

Contributors:

Miyake, S. (author) / Miyamoto, T. (author) / Kaneko, R. (author)

Published in:

WEAR -LAUSANNE- ; 168 ; 155

Publication date:

1993-01-01

Size:

155 pages

ISSN:

0043-1648

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11292

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