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    Silicon micromachining and micromachines

    New search for: Esashi, M.

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    Silicon micromachining and micromachines

    New search for: Esashi, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Silicon micromachining and micromachines

    New search for: Esashi, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Silicon micromachining and micromachines

    Contributors:

    Esashi, M. (author)

    Published in:

    WEAR -LAUSANNE- ; 168 ; 181

    Publication date:

    1993-01-01

    Size:

    181 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11292

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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