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Mask-less writing of microstructures with the PISAM

Vaeterlein, P. / Weiss, M. / Wuestenhagen, V. / Umbach, E.

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Mask-less writing of microstructures with the PISAM

Vaeterlein, P. / Weiss, M. / Wuestenhagen, V. / Umbach, E.

Mask-less writing of microstructures with the PISAM

Vaeterlein, P. / Weiss, M. / Wuestenhagen, V. / Umbach, E.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

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Document information

Title:

Mask-less writing of microstructures with the PISAM

Contributors:

Vaeterlein, P. (author) / Weiss, M. (author) / Wuestenhagen, V. (author) / Umbach, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 70/71 ; 278

Publication date:

1993-01-01

Size:

278 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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