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Radical Kinetics in Processing Plasmas: Optical Diagnostics of Gas Phase and Surface Reactions

Booth, J. P. / Hancock, G.

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Radical Kinetics in Processing Plasmas: Optical Diagnostics of Gas Phase and Surface Reactions

Booth, J. P. / Hancock, G.

Radical Kinetics in Processing Plasmas: Optical Diagnostics of Gas Phase and Surface Reactions

Booth, J. P. / Hancock, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Radical Kinetics in Processing Plasmas: Optical Diagnostics of Gas Phase and Surface Reactions

Contributors:

Booth, J. P. (author) / Hancock, G. (author)

Published in:

MATERIALS SCIENCE FORUM ; 219

Publication date:

1993-01-01

Size:

219 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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