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Ultraviolet laser ablation of Si~3N~4 thin films

Takigawa, Y. / Hemminger, J. C.

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Ultraviolet laser ablation of Si~3N~4 thin films

Takigawa, Y. / Hemminger, J. C.

Ultraviolet laser ablation of Si~3N~4 thin films

Takigawa, Y. / Hemminger, J. C.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Ultraviolet laser ablation of Si~3N~4 thin films

Contributors:

Takigawa, Y. (author) / Hemminger, J. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 79/80 ; 146

Publication date:

1994-01-01

Size:

146 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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