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Tantalum oxide film deposition by laser ablation

Nishimura, Y. / Hiroki, U. / Ochiai, T. / Tsuji, M.

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Tantalum oxide film deposition by laser ablation

Nishimura, Y. / Hiroki, U. / Ochiai, T. / Tsuji, M.

Tantalum oxide film deposition by laser ablation

Nishimura, Y. / Hiroki, U. / Ochiai, T. / Tsuji, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Tantalum oxide film deposition by laser ablation

Contributors:

Nishimura, Y. (author) / Hiroki, U. (author) / Ochiai, T. (author) / Tsuji, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 79/80 ; 165

Publication date:

1994-01-01

Size:

165 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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Thin tantalum and tantalum oxide films grown by pulsed laser deposition

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Pulsed laser deposition of tantalum oxide thin films

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