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Substitution of surface-adsorbed As atoms to P atoms in atomic layer epitaxy

Ikeda, H. / Miura, Y. / Takahashi, N. / Koukitu, A.

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Substitution of surface-adsorbed As atoms to P atoms in atomic layer epitaxy

Ikeda, H. / Miura, Y. / Takahashi, N. / Koukitu, A.

Substitution of surface-adsorbed As atoms to P atoms in atomic layer epitaxy

Ikeda, H. / Miura, Y. / Takahashi, N. / Koukitu, A.

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Document information

Title:

Substitution of surface-adsorbed As atoms to P atoms in atomic layer epitaxy

Contributors:

Ikeda, H. (author) / Miura, Y. (author) / Takahashi, N. (author) / Koukitu, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 82/83 ; 257

Publication date:

1994-01-01

Size:

257 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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