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Reactive IrO~2 sputtering in reducing/oxidizing atmospheres

Klein, J. D. / Clauson, S. L. / Cogan, S. F.

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Reactive IrO~2 sputtering in reducing/oxidizing atmospheres

Klein, J. D. / Clauson, S. L. / Cogan, S. F.

Reactive IrO~2 sputtering in reducing/oxidizing atmospheres

Klein, J. D. / Clauson, S. L. / Cogan, S. F.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Reactive IrO~2 sputtering in reducing/oxidizing atmospheres

Contributors:

Klein, J. D. (author) / Clauson, S. L. (author) / Cogan, S. F. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 10 ; 328

Publication date:

1995-01-01

Size:

328 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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