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Sputtered WSi~x for micromechanical structures

Ger, M.-L. / Brown, R. B.

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Sputtered WSi~x for micromechanical structures

Ger, M.-L. / Brown, R. B.

Sputtered WSi~x for micromechanical structures

Ger, M.-L. / Brown, R. B.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Sputtered WSi~x for micromechanical structures

Contributors:

Ger, M.-L. (author) / Brown, R. B. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 10 ; 1710

Publication date:

1995-01-01

Size:

1710 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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