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    Passivation of semiconductors by the remote plasma technique

    New search for: Kulisch, W.
    New search for: Kiel, F.
    New search for: Schiller, M.
    New search for: Reinke, S.
    New search for: Heusler, K. E.

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    Passivation of semiconductors by the remote plasma technique

    New search for: Kulisch, W.
    New search for: Kiel, F.
    New search for: Schiller, M.
    New search for: Reinke, S.
    New search for: Heusler, K. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Passivation of semiconductors by the remote plasma technique

    New search for: Kulisch, W.
    New search for: Kiel, F.
    New search for: Schiller, M.
    New search for: Reinke, S.
    New search for: Heusler, K. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Passivation of semiconductors by the remote plasma technique

    Contributors:

    Kulisch, W. (author) / Kiel, F. (author) / Schiller, M. (author) / Reinke, S. (author) / Heusler, K. E.

    Published in:

    Passivation of Metals and Semiconductors ; 155

    MATERIALS SCIENCE FORUM

    Publication date:

    1995-01-01

    Size:

    155 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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