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MoSi~2 diffusion barrier for the passivation of copper at elevated temperatures

Cvitkovic, R. / Ivey, D. G. / Stiles, J.

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MoSi~2 diffusion barrier for the passivation of copper at elevated temperatures

Cvitkovic, R. / Ivey, D. G. / Stiles, J.

MoSi~2 diffusion barrier for the passivation of copper at elevated temperatures

Cvitkovic, R. / Ivey, D. G. / Stiles, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

MoSi~2 diffusion barrier for the passivation of copper at elevated temperatures

Contributors:

Cvitkovic, R. (author) / Ivey, D. G. (author) / Stiles, J. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 30 ; 5415

Publication date:

1995-01-01

Size:

5415 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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