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Growth of diamond thin films by microwave plasma chemical vapor deposition process

Barshilia, H. C. / Mehta, B. R. / Vankar, V. D.

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Growth of diamond thin films by microwave plasma chemical vapor deposition process

Barshilia, H. C. / Mehta, B. R. / Vankar, V. D.

Growth of diamond thin films by microwave plasma chemical vapor deposition process

Barshilia, H. C. / Mehta, B. R. / Vankar, V. D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Growth of diamond thin films by microwave plasma chemical vapor deposition process

Contributors:

Barshilia, H. C. (author) / Mehta, B. R. (author) / Vankar, V. D. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 1019-1024

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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