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    Silicon thin films obtained by rapid thermal atmospheric pressure chemical vapour deposition

    New search for: Monna, R.
    New search for: Slaoui, A.
    New search for: Lachiq, A.
    New search for: Muller, J. C.

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    Silicon thin films obtained by rapid thermal atmospheric pressure chemical vapour deposition

    New search for: Monna, R.
    New search for: Slaoui, A.
    New search for: Lachiq, A.
    New search for: Muller, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Silicon thin films obtained by rapid thermal atmospheric pressure chemical vapour deposition

    New search for: Monna, R.
    New search for: Slaoui, A.
    New search for: Lachiq, A.
    New search for: Muller, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Silicon thin films obtained by rapid thermal atmospheric pressure chemical vapour deposition

    Contributors:

    Monna, R. (author) / Slaoui, A. (author) / Lachiq, A. (author) / Muller, J. C. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 39 ; 48-51

    Publication date:

    1996-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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