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Enhancement of diamond thin film quality by a cyclic deposition method under MPECVD

Park, Y. S. / Kim, S. H. / Jung, S. K. / Shinn, M. N. / Lee, J.-W. / Hong, S. K. / Lee, J. Y.

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Enhancement of diamond thin film quality by a cyclic deposition method under MPECVD

Park, Y. S. / Kim, S. H. / Jung, S. K. / Shinn, M. N. / Lee, J.-W. / Hong, S. K. / Lee, J. Y.

Enhancement of diamond thin film quality by a cyclic deposition method under MPECVD

Park, Y. S. / Kim, S. H. / Jung, S. K. / Shinn, M. N. / Lee, J.-W. / Hong, S. K. / Lee, J. Y.

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Document information

Title:

Enhancement of diamond thin film quality by a cyclic deposition method under MPECVD

Contributors:

Park, Y. S. (author) / Kim, S. H. (author) / Jung, S. K. (author) / Shinn, M. N. (author) / Lee, J.-W. (author) / Hong, S. K. (author) / Lee, J. Y. (author) / Sarin, V. K.

Published in:

Proceedings of the 5th International Conference on the Science of Hard Materials ; 414-419

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 209

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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