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    Use of Plasma Processing in Making Integrated Circuits and Flat-Panel Displays

    New search for: Gottscho, R. A.
    New search for: Barone, M. E.
    New search for: Cook, J. M.

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    Use of Plasma Processing in Making Integrated Circuits and Flat-Panel Displays

    New search for: Gottscho, R. A.
    New search for: Barone, M. E.
    New search for: Cook, J. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Use of Plasma Processing in Making Integrated Circuits and Flat-Panel Displays

    New search for: Gottscho, R. A.
    New search for: Barone, M. E.
    New search for: Cook, J. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Use of Plasma Processing in Making Integrated Circuits and Flat-Panel Displays

    Contributors:

    Gottscho, R. A. (author) / Barone, M. E. (author) / Cook, J. M. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 21 ; 38-42

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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