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Ni silicides formation and properties in RF sputtered Ni thin films

Belu-Marian, A. / Serbanescu, M. D. / Manaila, R. / Devenyi, A.

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Ni silicides formation and properties in RF sputtered Ni thin films

Belu-Marian, A. / Serbanescu, M. D. / Manaila, R. / Devenyi, A.

Ni silicides formation and properties in RF sputtered Ni thin films

Belu-Marian, A. / Serbanescu, M. D. / Manaila, R. / Devenyi, A.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Ni silicides formation and properties in RF sputtered Ni thin films

Contributors:

Belu-Marian, A. (author) / Serbanescu, M. D. (author) / Manaila, R. (author) / Devenyi, A. (author) / Gessner, T. / Schulz, S. E.

Published in:

Materials for Advanced Metallization ; 63-67

APPLIED SURFACE SCIENCE ; 91

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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