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Cluster beams for metallization of microstructured surfaces

Gatz, P. / Hagena, O. F.

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Cluster beams for metallization of microstructured surfaces

Gatz, P. / Hagena, O. F.

Cluster beams for metallization of microstructured surfaces

Gatz, P. / Hagena, O. F.

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Order at Subito €

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Document information

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Document information

Title:

Cluster beams for metallization of microstructured surfaces

Contributors:

Gatz, P. (author) / Hagena, O. F. (author) / Gessner, T / Schulz, S. E.

Published in:

Materials for Advanced Metallization ; 169-174

APPLIED SURFACE SCIENCE ; 91

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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