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Structural properties of epitaxial silicide layers on Si

Von Kaenel, H. / Mueller, E. / Goncalves-Conto, S. / Schwarz, C. / Onda, N.

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Structural properties of epitaxial silicide layers on Si

Von Kaenel, H. / Mueller, E. / Goncalves-Conto, S. / Schwarz, C. / Onda, N.

Structural properties of epitaxial silicide layers on Si

Von Kaenel, H. / Mueller, E. / Goncalves-Conto, S. / Schwarz, C. / Onda, N.

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Check availability in my library

Order at Subito €

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Document information

Title:

Structural properties of epitaxial silicide layers on Si

Contributors:

Von Kaenel, H. (author) / Mueller, E. (author) / Goncalves-Conto, S. (author) / Schwarz, C. (author) / Onda, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 104/105 ; 204-212

Publication date:

1996-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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