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Nitridation of GaAs surfaces stimulated by nitrogen glow discharge

Xu, Q. J. / Ding, X. M. / Hou, X. Y. / Wang, X.

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Nitridation of GaAs surfaces stimulated by nitrogen glow discharge

Xu, Q. J. / Ding, X. M. / Hou, X. Y. / Wang, X.

Nitridation of GaAs surfaces stimulated by nitrogen glow discharge

Xu, Q. J. / Ding, X. M. / Hou, X. Y. / Wang, X.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nitridation of GaAs surfaces stimulated by nitrogen glow discharge

Contributors:

Xu, Q. J. (author) / Ding, X. M. (author) / Hou, X. Y. (author) / Wang, X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 104/105 ; 468-471

Publication date:

1996-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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