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Surface Roughness Analysis of Diamond-Like Films by Low-Voltage Transmission Electron Microscopy

Shchetnev, Y. F. / Kichenko, E. V. / Belavtseva, E. M. / Shilov, I. P.

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Surface Roughness Analysis of Diamond-Like Films by Low-Voltage Transmission Electron Microscopy

Shchetnev, Y. F. / Kichenko, E. V. / Belavtseva, E. M. / Shilov, I. P.

Surface Roughness Analysis of Diamond-Like Films by Low-Voltage Transmission Electron Microscopy

Shchetnev, Y. F. / Kichenko, E. V. / Belavtseva, E. M. / Shilov, I. P.

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Document information

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Document information

Title:

Surface Roughness Analysis of Diamond-Like Films by Low-Voltage Transmission Electron Microscopy

Contributors:

Shchetnev, Y. F. (author) / Kichenko, E. V. (author) / Belavtseva, E. M. (author) / Shilov, I. P. (author)

Published in:

INDUSTRIAL LABORATORY C/C OF ZAVODSKAIA LABORATORIIA ; 62 ; 294-295

Publication date:

1996-01-01

Size:

2 pages

ISSN:

0019-8447

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 607.2

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